H

Hyo‐Chang Lee

Korea Aerospace University

ORCID: 0000-0003-2754-1512

241 papers and 2.1k citations.

PubIndex Score95Top 5%How it's scored

241Publications

2.1kTotal Citations

First publication: 2005First senior author: 2005

Top publicationsby citations

Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching

H. J. Yeom, Hyo‐Chang Lee|ACS Omega|2023

Cited by 16

Indexing the rest of 241 publications…