Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFMTakahiro Namazu, Tomoki Tanaka, Yoshitada Isono|Journal of Microelectromechanical Systems|2000Cited by 383
Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperaturesTakahiro Namazu, Tomoki Tanaka, Yoshitada Isono|Journal of Microelectromechanical Systems|2002Cited by 107