A 10nm high performance and low-power CMOS technology featuring 3<sup>rd</sup> generation FinFET transistors, Self-Aligned Quad Patterning, contact over active gate and cobalt local interconnectsA 10nm logic technology using 3rd-generation FinFET transistors with Self-Aligned Quad Patterning (SAQP) for critical patterning layers, and cobalt local interconnects at three local interconnect layers is described. For high density, a novel self-aligned contact over active gate process and elimination of the dummy gate at cell boundaries are introduced. The transistors feature rectangular fins with 7nm fin width and 46nm fin height, 5 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</sup> generation high-k metal gate, and 7 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</sup> -generation strained silicon. Four or six workfunction metal stacks are used to enable undoped fins for low Vt, standard Vt and optional high Vt devices. Interconnects feature 12 metal layers with ultra-low-k dielectrics throughout the interconnect stack. The highest drive currents with the highest cell densities are reported for a 10nm technology.
Unveiling Electrode–Electrolyte Design-Based NO Reduction for NH<sub>3</sub> SynthesisDong‐Yeon Kim, Dongyup Shin, Juheon Heo et al.|ACS Energy Letters|2020 The electrochemical N2 reduction reaction has attracted interest as a potential alternative to the Haber–Bosch process, but a significantly low conversion efficiency and a significantly low ammonia production rate stimulate the need for alternatives. Here, we represent the electrochemical reduction of nitric oxide (NO) on a nanostructured Ag electrode in combination with a rationally designed electrolyte containing the EDTA–Fe2+ metal complex (EFeMC), which results in an ∼100% efficiency for NH3 with a current density of 50 mA/cm2 at −0.165 VRHE, without any degradation in catalytic activity or product selectivity up to 120 h. Economic analysis using itemized cost estimation predicted that the synthesis of ammonia from NO reduction in an EFeMC-designed electrolyte can be market competitive at an electricity price of $0.03 kWh–1 with a current density of >125 mA/cm2. Therefore, this approach opens an entirely new avenue of renewable electricity-driven ammonia synthesis.