Unlocking Wafer‐Scale 3D Photonic Systems With Ion‐Beam‐Induced Origami
Yi Wang(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Changzhi Gu(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Xiaofeng Fan(Jilin University), Ruixuan Zheng(Education University of Hong Kong), Yang Guo(Tsinghua University), Baogang Quan(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), G W Liu(Chemical Synthesis Lab), Ziyi Fu(Chinese Academy of Sciences), Geng Li, Hu S(Henan University of Technology), Enbo Gao(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Weikang Fang(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Aizi Jin(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Baoli Liu(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Cai Luo(Chinese Academy of Sciences), Peng Bao(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Nannan Hu(Chinese Academy of Sciences)
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