Surface oxidation of refractory metals for stable oxide flux generation in molecular beam epitaxy

Jueli Shi(Pacific Northwest National Laboratory), Yingge Du(Pacific Northwest National Laboratory), Steven R. Spurgeon(National Laboratory of the Rockies), Tiffany C. Kaspar(Pacific Northwest National Laboratory), Hyo Ju Park(Pacific Northwest National Laboratory), Zhenzhong Yang(Pacific Northwest National Laboratory), Felix V. E. Hensling(Max Planck Institute for Solid State Research), Min‐Ju Choi(Pacific Northwest National Laboratory), Le Wang(Pacific Northwest National Laboratory)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
July 1, 2026
10.1116/6.0005502
Cited by 0

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