Measurements of elastic constants of wide Al-composition range AlGaN epi-materials from metalorganic chemical vapor deposition

Guang Chen(China Jiliang University), Changcai Cui(China Jiliang University), Ian T. Ferguson(Kennesaw State University), Benjamin Klein(Kennesaw State University), Fangfei Li(Jilin University), W. Lu(Hexagon (United States)), Zhe Chuan Feng(Kennesaw State University), Lingyu Wan(Guangxi University), Hao‐Hsiung Lin(National Taiwan University), Manika Tun Nafisa(Kennesaw State University), Gu Xu(McMaster University), Jeffrey Yiin(Kennesaw State University)
Journal of Applied Physics
July 1, 2026
Cited by 0


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