Electrically Tunable Meta-Waveplate Enabled by Sb2Se3-Heterogeneously Integrated Piezoelectric MEMS Mirror

Jianing Li(Zhejiang Normal University), Daru Chen(Zhejiang Normal University), Mingwei Tang(Zhejiang University), Rujun Zhou, Si Luo(Zhejiang Normal University), Zhangwei Yu(Zhejiang Normal University), Yadong Deng(Zhejiang Normal University), Yusheng Zhang(Zhejiang Normal University), Peishuai Wang(Zhejiang Normal University), Bin Zhang(Zhejiang Normal University), Ji Wang(Zhejiang Normal University), Chenning Tao(Zhejiang Normal University)
Micromachines
June 8, 2026
Cited by 0


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