Wafer-scale high- <i>k</i> SrTiO3 dielectrics with rational barrier-layer design for low leakage and high charge density

Majid Mohseni, Bharat Jalan(University of Minnesota), Seung Gyo Jeong(University of Minnesota), Shivasheesh Varshney(University of Minnesota), Amber Walton(Berkeley College), C. Daniel Frisbie(University of Minnesota)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
May 28, 2026
Cited by 0


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