Extending Vertical FET for Advanced Logic Scaling with Architecture Innovations: Dual-sided Global Signal, Flip VFET and Omega Nanosheet

Ziqiao Xu(Peking University), Ru Huang(Peking University), Z. Wang(Peking University), Yanbang Chu(Chinese Academy of Sciences), Xun Jiang(Northwestern University), M Li(Peking University), Y. X. Liu(Peking University), Ge Yj(Peking University), Lijie Zhang(Sinopec (China)), Siyuan Liu(University of California, San Francisco), Haobo Wu(Peking University), Runsheng Wang(Peking University), Yongqin Wu(Peking University), Xinyue He(Peking University), Yimeng Wang(Peking University), Yibo Lin(Nanjing University), Haoran Lu(Peking University), Weihai Bu(Semiconductor Manufacturing International (China))
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December 6, 2025
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