Synthesis of Two-Dimensional MoS 2 and WS 2 Films by Enclosed Chemical Vapor Transport Method below the Back-End-of-Line Temperature

Yang Chen(Hunan University), Xidong Duan(Hunan University), H. Wu(Central South University), Song Luo(Central South University), Dongyan Liu(Changchun University of Science and Technology), Jia Li(Hunan University), Mouyuan Liu(Hunan University), Ruixia Wu(Hunan University), Peng Wan(Hunan University), Dingyi Shen(Hunan University)

Nano Letters

January 2, 2026

Cited by 1

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Synthesis of Two-Dimensional MoS <sub>2</sub> and WS <sub>2</sub> Films by Enclosed Chemical Vapor Transport Method below the Back-End-of-Line Temperature