Anchor Fin Explored as an Important Design Parameter for Lamb Wave Resonators

Fuhong Lin(University of Science and Technology of China), Chengjie Zuo(Institute of Microelectronics), Zhongbin Dai(University of Science and Technology of China), Yiming Wang(University of Science and Technology of China), Jie Chen(Chinese Academy of Sciences), Juan Wang(South China Agricultural University), Shitao Chen(Anhui University), Meijuan Li(University of Science and Technology of China), Kai Yang(University of Science and Technology of China), Anping Zhang(Dalian Institute of Chemical Physics), Jiming Fang(University of Science and Technology of China)
Journal of Microelectromechanical Systems
December 8, 2025
Cited by 1


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