Deep-Ultraviolet Beam Homogenizers: Phase-Modulated Metalens vs. Space-Modulated Chromium Thin-Film
Chunyu Li(Shanghai Jiao Tong University), Hsiang‐Chen Chui(Dalian University of Technology), Xiaoming Chen(Dalian University of Technology), Junhong Li(Kunming University of Science and Technology), Guojun Xia(Central Glass (Japan)), H. R. Qi(Nanjing University), Duanqi Ma(Central Glass (Japan)), Shubo Cheng(Yangtze University)
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