Sealed Silicon Cavities (SSC) Equips Piezoelectric Micromachined Ultrasonic Transducer Arrays with an Ultra-High Fill Factor of 95.5%

Jiashuai Xu(Hong Kong University of Science and Technology), Yansong Yang(Hong Kong University of Science and Technology), Chengjie Zuo(Institute of Microelectronics), Xiaoya Duan(Hong Kong University of Science and Technology), Xinyue Zhang(Peking University), Yipeng Lu(Peking University), Yufeng Gao(Anhui Medical University), Zhichen Yan(Hong Kong University of Science and Technology), Zijun Ren(Xi'an Jiaotong University), Kai Yang(University of Science and Technology of China), Junyan Zheng(China Agricultural University)
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September 15, 2025
Cited by 1


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