Enhancing Mechanical Stability of MEMS Resonator at Cryogenic Temperature Using Periodically Poled Thin Films

Junyan Zheng(Hong Kong University of Science and Technology), Yansong Yang(Hong Kong University of Science and Technology), Fangsheng Qian(Hong Kong University of Science and Technology), Zijun Ren(Xi'an Jiaotong University), Kai Yang(University of Science and Technology of China), Xingyu Liu(University of Electronic Science and Technology of China), Jiashuai Xu(Hong Kong University of Science and Technology)
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September 15, 2025
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