Impacts of different thickness Al2O3 and SiO2 atomic layer deposition sidewall passivation for GaN-based micro-LEDs

Zongmin Lin(Xiamen University), Shouqiang Lai(Xiamen University), Yuxuan Liu(Xiamen University), Jinhua Zhang(Xiamen University), Zhong Chen(Xiamen University), Lijie Zheng, Guolong Chen(Xiamen University)
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
September 1, 2025
Cited by 2


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