MEMS Chip-Based Miniaturized Fiber-Optic Fabry–Pérot Sensor for Highly-Sensitive and Wide-Band Acceleration Detection
Long Zhang(University of Science and Technology of China), Jiande Wu, Shengjie Hou(Institute of Process Engineering), Xiaojun Chen(Hangzhou Institute of Applied Acoustics), Deming Liu(Second Hospital of Shandong University), Siyu Liu(Wuhan National Laboratory for Optoelectronics), Yufeng Pan(Nanjing Tech University), Zhang Da(Hangzhou Institute of Applied Acoustics)
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