First Demonstration of Monolithic CFET Inverter at 48nm Gate Pitch Toward Future Logic Technology Scaling
Siyong Liao(Taiwan Semiconductor Manufacturing Company (Taiwan)), Min Cao(Taiwan Semiconductor Manufacturing Company (Taiwan)), Hung-Ping Lo(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wei‐Yen Woon(Taiwan Semiconductor Manufacturing Company (Taiwan)), Shuhua Huang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Jia‐Yao Jhang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Y. C. Lee(Taiwan Semiconductor Manufacturing Company (Taiwan)), Robert F. Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), G. Tsai(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chun-Yeon Lin(Taiwan Semiconductor Manufacturing Company (Taiwan)), Jung‐Lung Hsu(Taiwan Semiconductor Manufacturing Company (Taiwan)), C.Y. Lee(Taiwan Semiconductor Manufacturing Company (Taiwan)), Stacy Ho(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yung‐Hsiao Chiang(Taipei Medical University Hospital), Hao-Hsiu Hung(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wei-Xiang You(Taiwan Semiconductor Manufacturing Company (Taiwan)), K. K. Hu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yucheng Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chenyan Sha(Shanghai Academy of Environmental Sciences), Chia‐Ming Chang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Mi‐Ching Tsai(Taiwan Semiconductor Manufacturing Company (Taiwan)), Ting Wu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Bing‐Hung Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Cheng‐Yi Liu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yi Shen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Cheng‐Chen Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Peihua Lin(Anhui University of Traditional Chinese Medicine), Jiajun Wen(Taiwan Semiconductor Manufacturing Company (Taiwan)), K.F. Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Guang-Cheng Wang(Taiwan Semiconductor Manufacturing Company (Taiwan)), W.D. Ho(Taiwan Semiconductor Manufacturing Company (Taiwan)), S.H. Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wei Yip Loh(Taiwan Semiconductor Manufacturing Company (Taiwan)), T.K. Chiu(Taiwan Semiconductor Manufacturing Company (Taiwan)), C.H. Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yaohua Li(Taiwan Semiconductor Manufacturing Company (Taiwan)), Kai‐Chien Yang(National Taiwan University)
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