First Demonstration of Monolithic CFET Inverter at 48nm Gate Pitch Toward Future Logic Technology Scaling

Siyong Liao(Taiwan Semiconductor Manufacturing Company (Taiwan)), Min Cao(Heilongjiang University), Hung-Ping Lo(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wei‐Yen Woon(Taiwan Semiconductor Manufacturing Company (Taiwan)), Shuhua Huang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Jia‐Yao Jhang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Y. C. Lee(Taiwan Semiconductor Manufacturing Company (Taiwan)), Robert F. Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), G. Tsai(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chun-Yeon Lin(Taiwan Semiconductor Manufacturing Company (Taiwan)), Jung‐Lung Hsu(Taiwan Semiconductor Manufacturing Company (Taiwan)), C.Y. Lee(Taiwan Semiconductor Manufacturing Company (Taiwan)), Stacy Ho(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yung‐Hsiao Chiang(Taipei Medical University Hospital), Hao-Hsiu Hung(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wei-Xiang You(Taiwan Semiconductor Manufacturing Company (Taiwan)), K. K. Hu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yucheng Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chenyan Sha(Shanghai Academy of Environmental Sciences), Chia‐Ming Chang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Mi‐Ching Tsai(Taiwan Semiconductor Manufacturing Company (Taiwan)), Ting Wu(Taiwan Semiconductor Manufacturing Company (Taiwan)), Bing‐Hung Chen(Tainan University of Technology), Cheng‐Yi Liu(National Central University), Yi Shen(Huazhong Agricultural University), Cheng‐Chen Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Peihua Lin(Shanghai Jiao Tong University), Jiajun Wen(Taiwan Semiconductor Manufacturing Company (Taiwan)), K.F. Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Guang-Cheng Wang(Taiwan Semiconductor Manufacturing Company (Taiwan)), W.D. Ho(Taiwan Semiconductor Manufacturing Company (Taiwan)), S.H. Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Wei Yip Loh(Taiwan Semiconductor Manufacturing Company (Taiwan)), T.K. Chiu(Taiwan Semiconductor Manufacturing Company (Taiwan)), C.H. Chen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Yaohua Li(Nanyang Technological University), Kai‐Chien Yang(National Taiwan University)
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December 7, 2024
Cited by 22


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