Enhancing chemical vapor deposition growth and fabrication techniques to maximize hole conduction in tungsten diselenide for monolithic CMOS integration

Jatin V. Singh(The University of Texas at Austin), Sanjay K. Banerjee(The University of Texas at Austin), S. S. Teja Nibhanupudi(The University of Texas at Austin), Matthew Disiena(The University of Texas at Austin), Anupam Roy(Birla Institute of Technology, Mesra), JaeHyun Ahn(Samsung (South Korea)), Dong-Won Kim(Samsung (South Korea))
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
February 13, 2025
Cited by 0


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