An In Vivo Biostability Evaluation of ALD and Parylene‐ALD Multilayers as Micro‐Packaging Solutions for Small Single‐Chip Implants

Kambiz Nanbakhsh(Delft University of Technology), Vasiliki Giagka(Fraunhofer Institute for Reliability and Microintegration), Wouter A. Serdijn(BioElectronics (United States)), Astrid Gollhardt(Fraunhofer Institute for Reliability and Microintegration), Kinga Tóth(Institute of Cognitive Neuroscience and Psychology), Domokos Meszéna(Pázmány Péter Catholic University), István Ulbert(Semmelweis University), Domonkos Horváth(Pázmány Péter Catholic University), Matthias Van Gompel, Riina Ritasalo
Small
January 23, 2025
Cited by 8


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