High sound pressure piezoelectric micromachined ultrasonic transducers using sputtered potassium sodium niobate

Fan Xia(University of California, Berkeley), Liwei Lin(Sun Yat-sen University), Lane W. Martin(Lawrence Berkeley National Laboratory), Megan Teng(National Taiwan University), Megha Acharya(Lawrence Berkeley National Laboratory), Sedat Pala(University of California, Berkeley), Xiaobing Yu(Huazhong University of Science and Technology), Yuanzheng Ma(Tsinghua University), Chunming Chen(University of California, Berkeley), Mingze Luo(Southeast University), Yande Peng(University of California, Berkeley), Ryuichi Arakawa(Kansai University), Wei Yue(University of California, Berkeley)
Microsystems & Nanoengineering
December 27, 2024
Cited by 10


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