A Review of Optical Interferometry for High-Precision Length Measurement

Guangyao Huang(National University of Defense Technology), Guochao Wang(National University of Defense Technology), Can Cui(Tsinghua–Berkeley Shenzhen Institute), Shuhua Yan(National University of Defense Technology), Xiaoyang Lei(National University of Defense Technology), Xinghui Li(Tsinghua–Berkeley Shenzhen Institute), Qixue Li(National University of Defense Technology)
Micromachines
December 24, 2024
Cited by 40


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