Growth-based monolithic 3D integration of single-crystal 2D semiconductors

Ki Seok Kim(Gwangju Institute of Science and Technology), June‐Chul Shin(Massachusetts Institute of Technology), Youhwan Jo(The University of Texas at Dallas), Hanggyo Jung(The University of Texas at Dallas), Seunghwan Seo(Korea Advanced Institute of Science and Technology), Min‐Kyu Song(Massachusetts Institute of Technology), Minsu Seol(Samsung (South Korea)), Jung‐El Ryu(Massachusetts Institute of Technology), Jeehwan Kim(Samsung (South Korea)), Hogeun Ahn(Massachusetts Institute of Technology), Jun Min Suh(Massachusetts Institute of Technology), Doyoon Lee(Massachusetts Institute of Technology), Changhyun Kim(Samsung (South Korea)), Jekyung Kim(Sejong University), Sangho Lee(Massachusetts Institute of Technology), Jin‐Hong Park(LG (United States)), Jongwook Jeon(Samsung (South Korea)), Jeehwan Kim(Massachusetts Institute of Technology), Junyoung Kwon(Samsung (South Korea)), Kyeongjae Cho(Seoul Semiconductor (South Korea)), Jin Feng(Massachusetts Institute of Technology)
Nature
December 18, 2024
10.1038/s41586-024-08236-9
Cited by 88

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