Structural and piezoelectric properties of chemical vapor deposited AlN films on metallic substrates：DOE approach
Juan Su(Science et Ingénierie des Matériaux et Procédés), Raphaël Boichot(Institut polytechnique de Grenoble), Danying Chen(Institut polytechnique de Grenoble), F. Mercier(Hôpital Antoine-Béclère), Michel Pons(Science et Ingénierie des Matériaux et Procédés)
HAL (Le Centre pour la Communication Scientifique Directe)
May 19, 2019
Cited by 0
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