Crystallization behavior and properties of Li2O-Al2O3-SiO2 photosensitive glass-ceramics for three-dimensional integrated circuits
Guoqing Wang(Wuhan Polytechnic University), Bin Lin(University of Electronic Science and Technology of China), Weirong Huo(University of Electronic Science and Technology of China), Gang Ye(China Electronics Technology Group Corporation), Bin Hu(Xinjiang New Energy Research Institute (China)), Tianlai Yu
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