A Dual-Gate Vertical Channel IGZO Transistor for BEOL Stackable 3D Parallel Integration for Memory and Computing Applications

Ziyi Liu(Tsinghua University), Yuegang Zhang(Tsinghua University), Jun Xu(Civil Aviation Administration of China), Zhigang Zhang(Yunnan University), Huaqiang Wu(Tsinghua University), He Qian(University of Science and Technology of China), Liyang Pan(Institute of Microelectronics), Yiwei Dul(Tsinghua University), Renrong Liang(Institute of Microelectronics), Jianshi Tang(Tsinghua University), Qi Hu, Bin Gao(Chinese Academy of Sciences)
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