Fabrication and characterization of high-sensitivity, wide-range, and flexible MEMS thermal flow velocity sensors

Min Li(Anhui Academy of Agricultural Sciences), Qijing Lin(Yantai University), Guoxi Luo(Yantai University), Guangzhao Qin(Hunan University), Shusheng Xu(Yantai University), Ping Yang(Yantai University), Xiangguang Han(Yantai University), Zhikang Li(Yantai University), Chen Jia(Zhejiang University), Libo Zhao(Yantai University), Danyu Zhang(China XD Group (China)), Cunlang Liu(China XD Group (China))
Microsystems & Nanoengineering
July 22, 2024
Cited by 12


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