High-Q SAW Resonators Based on High-Crystallinity AlScN-AlN-Sapphire Substrate

Fuhong Lin(University of Science and Technology of China), Chengjie Zuo(Institute of Microelectronics), Qikun Wang(Ultrasonic Technologies (United States)), Haoran Tao(University of Science and Technology of China), Liang Wu(Ultrasonic Technologies (United States)), Kai Yang(University of Science and Technology of China)
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