A review of ultra-short pulse laser micromachining of wide bandgap semiconductor materials: SiC and GaN

Keran Jiang(Shanghai University of Engineering Science), Guanglong Chen(Shanghai University of Engineering Science), Hua Yan(Shanghai University of Engineering Science), Peilei Zhang(Shanghai University of Engineering Science), Tianzhu Sun(University of Warwick), Qinghua Lu(Foshan University), Shijie Song(Wuhan Polytechnic University), Yu Chen(National Synchrotron Radiation Laboratory), Haichuan Shi(Shanghai University of Engineering Science)
Materials Science in Semiconductor Processing
May 27, 2024
Cited by 93


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