Influence of Growth Process on Suppression of Surface Morphological Defects in 4H-SiC Homoepitaxial Layers

Yicheng Pei(Institute of Semiconductors), Xingfang Liu(Institute of Semiconductors), Weilong Yuan(Guangxi University), Ning Guo(Chinese Academy of Sciences), Yunkai Li(China Agricultural University), Xiuhai Zhang(Guangxi University)
Micromachines
May 21, 2024
Cited by 5


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