Multi-Order Pole Bias Compensation White Light Interferometric Topography Measurement Method

Yao Dong, Yitian Liu, Xu Guo(State Key Laboratory of Pharmaceutical Biotechnology), Yukun Wang, Ye Yuan(First Affiliated Hospital of Henan University), feifan shi, Wei Huang, Mingyu Yang(Hong Kong University of Science and Technology), Hangang Liang, X. Wang(University of Science and Technology of China), Dapeng Tian(Changchun Institute of Optics, Fine Mechanics and Physics)
SSRN Electronic Journal
January 1, 2024
Cited by 0


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