Super-stealth dicing of transparent solids with nanometric precision

Zhen‐Ze Li(Jilin University), Hong‐Bo Sun(Jilin University), Yi Wang(Tsinghua University), Lei Wang(Jilin University), Qi‐Dai Chen(State Key Laboratory on Integrated Optoelectronics), Yi‐Shi Xu(Jilin University), Xiaojie Wang(Tsinghua University), Xu Zhang(Jilin University), Xinjing Zhao(Jilin University), Saulius Juodkazis, Hua Fan(Jilin University), Yan‐Hao Yu(Jilin University)
Nature Photonics
May 8, 2024
Cited by 112


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