Research on the Influence of Carbon Sources and Buffer Layers on the Homogeneous Epitaxial Growth of 4H-SiC

Weilong Yuan(Guangxi University), Xingfang Liu(Institute of Semiconductors), Yicheng Pei(Institute of Semiconductors), Ning Guo(Chinese Academy of Sciences), Yunkai Li(China Agricultural University), Xiuhai Zhang(Guangxi University)
Micromachines
April 29, 2024
Cited by 4


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