Design and Fabrication of a TR Microsystem in <i>Ka</i>-Band With Si-Based 3-D Heterogeneous Integration
Faxin Yu(Zhejiang University), Zhiyu Wang(Zhejiang University), Guangjian Feng(Zhejiang University), Chenge Wang(Zhejiang University), Xi Shan Guo(Zhejiang University), Siyuan Ma(Guangxi University)
IEEE Transactions on Components Packaging and Manufacturing Technology
April 9, 2024
Cited by 10
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