Seamless monolithic three-dimensional integration of single-crystalline films by growth

Ki Seok Kim(Gwangju Institute of Science and Technology), Jeehwan Kim(Massachusetts Institute of Technology), Youhwan Jo(The University of Texas at Dallas), Hanggyo Jung(The University of Texas at Dallas), Seunghwan Seo(Korea Advanced Institute of Science and Technology), Min‐Kyu Song(Massachusetts Institute of Technology), Minsu Seol(Samsung (South Korea)), Jung‐El Ryu(Massachusetts Institute of Technology), Hogeun Ahn(Massachusetts Institute of Technology), Jun Min Suh(Massachusetts Institute of Technology), Doyoon Lee(Massachusetts Institute of Technology), Jekyung Kim(Sejong University), Changhyun Kim, Jin‐Hong Park(LG (United States)), Sang Won Kim, Junyoung Kwon(Pohang University of Science and Technology), Kyeongjae Cho(Seoul Semiconductor (South Korea)), Sangho Lee, Jongwook Jeon
arXiv (Cornell University)
December 6, 2023
Cited by 3


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