Micro X-ray fluorescence device based on monocapillary ellipsoidal lens for thin film thickness measurement

Tianyu Yuan(Beijing Normal University), Xuepeng Sun(Chinese Academy of Sciences), Lan Zhang(Beijing Institute of Technology), Chengbo Li(Beijing Academy of Science and Technology), Huiquan Li(Shenzhen University), Tianxi Sun(Purple Mountain Observatory), Bin Liao(Beijing Normal University), Yuchuan Zhong(Beijing Normal University), Hua Lü(Beijing Normal University)
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment
November 14, 2023
Cited by 4


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