The Optimization of Pin Hole Defect in High Resistance Process

Lunan Zhu(Shanghai Huali Microelectronics (China)), Yu Zhang(Shanghai Huali Microelectronics (China)), Quanbo Li(Shanghai Huali Microelectronics (China)), Shan Huang(Shanghai Huali Microelectronics (China)), Xiaofeng Qu(Shanghai Huali Microelectronics (China)), Lei Sun(Maternal and Child Health Hospital of Xinjiang Uygur Autonomous Region), Tianpeng Guan(Shanghai Huali Microelectronics (China))
Unknown
June 26, 2023
10.1109/cstic58779.2023.10219201
Cited by 0

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