The polishing methods for large area CVD diamond wafer
Haochen Zhang(University of Science and Technology of China), Meiyong Liao(National Institute for Materials Science), Shuai Zhou(State Key Laboratory of Pollution Control and Resource Reuse), Zhipeng Song(University of Chinese Academy of Sciences), Zilong Zhang(National Institute for Materials Science), Guo Chen(China University of Mining and Technology), Zengyu Yan(University of Chinese Academy of Sciences), Guangchao Chen(National Institute for Materials Science)
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