Super stealth dicing of transparent solids with nanometric precision
Zhen‐Ze Li(Jilin University), Hong‐Bo Sun(Jilin University), Yi Wang(Tsinghua University), Lei Wang(Jilin University), Qi‐Dai Chen(State Key Laboratory on Integrated Optoelectronics), Wen Xu(State Ethnic Affairs Commission), Yi‐Shi Xu(Jilin University), Xiaojie Wang(Tsinghua University), Xinjing Zhao(Jilin University), Saulius Juodkazis, Hua Fan(Jilin University), Yan‐Hao Yu(Jilin University)
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