P‐7.5: Analysis and research on the improvement of OPC compensation aperture ratio

Guoqiang Zhong(Chinese Academy of Sciences), Zhenyi LIU(BOE Technology Group (China)), Zhangtao Wang(BOE Technology Group (China)), Jian Chen(University of Science and Technology of China), Yongcan WANG(BOE Technology Group (China)), Shenwei SHI(BOE Technology Group (China)), Wenhao TANG(BOE Technology Group (China)), Xibin Shao(BOE Technology Group (China)), Ran Zhang(East China Normal University)
SID Symposium Digest of Technical Papers
April 1, 2023
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