Layered Epitaxial Growth of 3C/4H Silicon Carbide Confined by Surface Micro-Nano Steps

Ning Guo(Chinese Academy of Sciences), Xingfang Liu(Chinese Academy of Sciences), Yunkai Li(China Agricultural University), Siqi Zhao(Chinese Academy of Sciences), Shangyu Yang(Beijing Institute of Technology), Yicheng Pei(Institute of Semiconductors), Yang Zhang(Chinese Academy of Sciences), Weilong Yuan(Guangxi University)
Crystals
July 19, 2023
Cited by 5


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