Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

Wenqing Chen(Wuhan University), Mengwei Li(Beijing Jiaotong University), Jin Li(Shenyang Medical College), Zhibin Wang, Hai‐Feng Peng(Dalian University of Technology)
Micromachines
June 25, 2023
Cited by 8


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