3‐Masks‐Processed Sub‐100 nm Amorphous InGaZnO Thin‐Film Transistors for Monolithic 3D Capacitor‐Less Dynamic Random Access Memories

Yuqing Zhang(Fujian Medical University), Shengdong Zhang(Peking University), Tengyan Huang(Peking University), Yuhang Guan(Peking University), Xinwei Wang(Sinopec (China)), Yuhan Zhang(Columbia University), Huan Yang(Peking University), Jiye Li(Henan University of Technology), Jinxiong Li(Peking University), Lei Lü(Peking University), Mansun Chan(Hong Kong University of Science and Technology)
Advanced Electronic Materials
June 23, 2023
Cited by 19


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