Crystalline and optical properties of AlN films with varying thicknesses (0.4-10 µm) grown on sapphire by metalorganic chemical vapor deposition

Zhe Chuan Feng(Kennesaw State University), Ian T. Ferguson(Kennesaw State University), Junhua Yin(Guangxi University), Yao Liu(Guangzhou University of Chinese Medicine), Benjamin Klein(Kennesaw State University), Jiangnan Dai(Wuhan National Laboratory for Optoelectronics), Changqing Chen(Wuhan National Laboratory for Optoelectronics), Hong Yang(Shanxi University), Lingyu Wan(Guangxi University), Vishal Saravade(Pennsylvania State University), Jeffrey Yiin(Kennesaw State University), Kaiyan He(Guangxi University), Feng Wu(Shanghai Institute of Technical Physics)
Thin Solid Films
June 21, 2023
Cited by 11


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