Crystalline and optical properties of AlN films with varying thicknesses (0.4-10 µm) grown on sapphire by metalorganic chemical vapor deposition
Zhe Chuan Feng(Kennesaw State University), Ian T. Ferguson(Kennesaw State University), Junhua Yin(Guangxi University), Yao Liu(Guangdong University of Technology), Benjamin Klein(Kennesaw State University), Jiangnan Dai(Wuhan National Laboratory for Optoelectronics), Changqing Chen(Huazhong University of Science and Technology), Hong Yang(The University of Western Australia), Lingyu Wan(Guangxi University), Vishal Saravade(Pennsylvania State University), Jeffrey Yiin(Kennesaw State University), Kaiyan He(Guangxi University), Feng Wu(Shanghai Institute of Technical Physics)
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