Deep Sub-Micron Self-Aligned Bottom-Gate Amorphous InGaZnO Thin-Film Transistors With Low-Resistance Source/Drain

Yuhan Zhang(Columbia University), Shengdong Zhang(Peking University), Yuhang Guan(Peking University), Huan Yang(Peking University), Yuqing Zhang(Fujian Medical University), Jiye Li(Henan University of Technology), Lei Lü(Peking University), Mansun Chan(Hong Kong University of Science and Technology)
IEEE Electron Device Letters
June 20, 2023
Cited by 19


Related Papers