Rational Strategy for Space-Confined Atomic Layer Deposition

Ryoma Kamei(Kyushu University), Takeshi Yanagida(Kyushu University), Koji Otsuka(Tokushima University), Eisuke Kanao(Kyoto University), Tsunaki Takahashi(NTT (Japan)), Katsuya Nakano(Kyoto University), Takuya Kubo(Kyoto University), Kazuki Nagashima(The University of Osaka), Masaki Kanai(The University of Osaka), Takuro Hosomi(Tokyo University of Technology), Wataru Tanaka(The University of Tokyo), Wenjun Li(Shenwu Technology Group Corp (China)), Jiangyang Liu(The University of Tokyo)
ACS Applied Materials & Interfaces
May 8, 2023
Cited by 3


Related Papers