Pixelation of GaN based Micro-LED arrays by tailoring injection energy and dose of fluorine ion implantation

Jinyu Ye(Zhejiang University of Science and Technology), Chaoxing Wu(Hanyang University), Yuyan Peng(Fuzhou University), Qun Yan, Haonan Wang(Fuzhou University), Tailiang Guo(Tan Kah Kee Innovation Laboratory), Yongai Zhang(Fuzhou University), Xiongtu Zhou(Tan Kah Kee Innovation Laboratory), Canlin Luo(Fuzhou University), Jie Sun(Tan Kah Kee Innovation Laboratory)
Journal of Luminescence
May 8, 2023
Cited by 19


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