Characterization of AlN thin film piezoelectric coefficient d31 using Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)

Zhenghu Zhang(Shanghai University), Liang Lou(Shanghai University), Mingze Gao(Shanghai University), Zhipeng Wu(Shanghai Industrial Technology Institute), Linwei Zhang(Huazhong Agricultural University)
Journal of Physics Conference Series
May 1, 2023
Cited by 1


Related Papers