Electrochemical etching modes of 4H-SiC in KOH solutions

Shangyu Yang(Beijing Institute of Technology), Yunkai Li(China Agricultural University), Siqi Zhao(Chinese Academy of Sciences), Junhong Chen(Xihua University), Min Guan(East China Normal University), Yiping Zeng(Chinese Academy of Sciences), Guoguo Yan(Chinese Academy of Sciences), Guosheng Sun(Chinese Academy of Sciences), Yang Zhang(Qinghai University)
Semiconductor Science and Technology
April 4, 2023
Cited by 15


Related Papers