On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

Zilong Zhang(National Institute for Materials Science), Meiyong Liao(National Institute for Materials Science), Yasuo Koide(National Institute for Materials Science), Guo Chen(China University of Mining and Technology), Wen Zhao(King Abdullah University of Science and Technology), Masaya Toda(Tohoku University), Satoshi Koizumi(National Institute for Materials Science)
Advanced Functional Materials
March 27, 2023
Cited by 35


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