The deposition of Ir/YSZ double-layer thin films on silicon by PLD and magnetron sputtering: Growth kinetics and the effects of oxygen

Guangdi Zhou(Southern University of Science and Technology), Zhanguo Wang(Chengdu University), Ju Wu(Chinese Academy of Sciences), Xiaodi Huo(Chinese Academy of Sciences), Pengfei Qu(Chinese Academy of Sciences), Peng Jin(Chinese Academy of Sciences)
Results in Physics
March 13, 2023
10.1016/j.rinp.2023.106357
Cited by 12

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